Synthetic Suspension Lapping Vehicle
AQUALAP 19-C is a highly concentrated, completely water-soluble synthetic lapping gel. It was designed for lapping of silicon wafers. AQUALAP 19-C is the original suspension lapping vehicle for wafers up to 6″ diameter.
Product Benefits / Features:
- Very fast stock removal rates and excellent surface finish at flow rates as low as 80 ml/minute of lapping slurry
- Superior suspension characteristics dilutions of only 6% to 8% in deionized water
- Easy cleaning of lapped wafers
Typical Properties:
| Appearance: | Transparent Gel |
|---|---|
| Density - (G/CC): | 1.12 – 1.15 |
| pH: | 9.20 – 9.60 |
| RoHs compliant |
*Typical Properties do not constitute exact specifications.
Application:
STARTING SLURRY FORMULA BY WEIGHT:
| AQUALAP 19-C | 6 – 8% |
|---|---|
| Fujimi PWA, or “FO” powder | 5-25% |
| Deionized Water | balance |
*Note: If using abrasives other than Fujimi, we recommend the customer to send samples to our laboratory for compatibility testing.
Mixing:
Slurry preparation: homogeneous slurry preparation is critical to achieve the best wafer quality.
Please refer to PRP’s technical data sheet describing how to achieve homogeneous slurry on a repeatable basis.
Cleaning:
Process Research Products recommends Ultraclean E, Ultraclean 1435-A, or Ultraclean 518-S for post lap cleaning. Our Technical Service Department would be happy to discuss alternate cleaners for special applications.
